Reactive Ion Etching (RIE) System

The Walther-Meißner-Institut (WMI) will acquire a Reactive Ion Etching (RIE) System for the fabrication of superconducting quantum circuits. This requires the ability to run a variety and combination of etching processes and process monitoring capabilities to enable the reproducible fabrication of devices of the highest quality

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Haupt-CPV-Code

38000000: Laborgeräte, optische Geräte und Präzisionsgeräte (außer Gläser)